Electrochemical characterization of nanostructured Ag:TiN thin films produced by glancing angle deposition on polyurethane substrates for bio-electrode applications

作者: Paulo Pedrosa , Diogo Machado , Patrique Fiedler , Beatriz Vasconcelos , Eduardo Alves

DOI: 10.1016/J.JELECHEM.2016.03.005

关键词: ElectrochemistryDielectric spectroscopyChemical engineeringThin filmElectrodePorosityElectrochemical noiseChemistryVoltammetryMetallurgyTin

摘要: Abstract Flexible polyurethane substrates were coated with Ag:TiN thin films (N/Ti atomic ratio = 0.7; 10 at.% Ag), different column inclinations (α = 0°, 40° and 80°) architectures (columnar, zigzag 2 4 periods), using the Glancing Angle Deposition (GLAD) technique. The coatings characterized in order to assess best film architecture suit bio-potential electrode applications. An abrupt increase of porosity samples was perceivable increasing α angles (particularly from 80°). Hence, sputtered could be divided into dense (Ag:TiN 0° 40°) porous 80°, 80° 2Z 4Z) samples. electrochemical behaviour consistently linked differences, which accompanied by an surface Ag content. Furthermore, exhibited lower impedances (~ 10  Ωcm at 2 MHz), as well noise drift rate values similar those commercial Ag/AgCl electrodes. 4Z GLAD seem most promising for envisaged

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