Deposition and characterization Zr-Al-N coatings prepared by magnetron sputtering for tribological applications

摘要: Abstract A sequence of Zr-Al-N thin films with differed content Al were placed using RF/DC magnetron sputtering .This experiment focuses on considering the mechanical and tribological properties by differing attention Aluminium .The purpose this study is to decrease friction rise efficiency ,lifespan material. The characterization techniques that are used yield x-ray diffraction (XRD) for level identification crystalline material, Scanning electron microscope (SEM) yields images a trial scanning surface, Energy-dispersive analysis(EDX) find essential composition coated profilometer measures thickness surface roughness coating, nano-indentation investigates hardness, elasticity, plasticity index material , tribometer coefficient friction, force, wear between surfaces. obtained from 0.8 µm 1.65 µm. rate cannot be calculated due track resulted in unusual shape but we can say excellent resistance attained where concentration 21.27 at. %. Hardness modulus value reduced increasing further.