Quantitative Analysis (Data Evaluation)
作者： Siegfried Hofmann
DOI: 10.1007/978-3-642-27381-0_4
关键词: Signal 、 Computational physics 、 Materials science 、 Electron 、 Attenuation length 、 Sensitivity (control systems) 、 X-ray photoelectron spectroscopy 、 Intensity (heat transfer) 、 Homogeneous distribution 、 Quantitative analysis (chemistry)
摘要: AES and XPS are quantitative analytical tools. The basis of their quantification is the determination intensity a characteristic signal from measured spectrum. Mainly depending on tolerable uncertainty in respective task, obtained by application more or less elaborate procedures to raw data, as outlined next paragraph (Sect.4.1). Section 4.2 presents basic tools for such relative sensitivity factors electron attenuation length spectroscopies. As shown Sect. 4.3 4.4 AES, intensities terms atomic concentrations only possible knowledge in-depth distribution composition, with limiting cases homogeneous thin layer(s) substrate.
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