A three-dimensional investigation of the effects of excitation frequency and sheath gas mixing in an atmospheric-pressure inductively coupled plasma system

作者: V Colombo , E Ghedini , P Sanibondi

DOI: 10.1088/0022-3727/43/10/105202

关键词: MechanicsPlasmaThermodynamicsTurbulenceAtmospheric pressureMixing (process engineering)Diffusion (business)ArgonCurrent (fluid)ChemistryInductively coupled plasmaAcoustics and UltrasonicsElectronic, Optical and Magnetic MaterialsSurfaces, Coatings and FilmsCondensed matter physics

摘要: A three-dimensional numerical model for the simulation of behaviour a commercial inductively coupled plasma torch with non-axisymmetric reaction chamber has been developed, taking into account turbulence and gas mixing through RNG k– theory combined diffusion approach Murphy, respectively.The effects changing coil current frequency, hydrogen in an argon primary flow patterns temperature distributions which take place lateral outlet system two observation windows have investigated, final aim setting up computational tool able to predict main features assisted treating processing injected raw materials.Three-dimensional shapes temperature, velocity mass fraction fields obtained analysed Ar–H2 mixture at atmospheric pressure. Computations performed different frequencies, i.e. 3 13.56 MHz, showing that lower value 3D discharge are enhanced.Accurate demixing mechanisms investigated both cases, including considerations on relative importance thermal contributions due mole gradients.Temperature cases correlated recirculation flows as consequence non-axisymmetry chamber.

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