An electrostatic springless inertial harvester for converting multi-dimensional low-frequency motion

作者: T. Galchev , R. Raz , O. Paul

DOI: 10.1109/MEMSYS.2013.6474187

关键词: CapacitorMechanical energyMagnetTransducerProof massMaterials scienceAcousticsElectrical engineeringNeodymium magnetFerrofluidCapacitance

摘要: This paper introduces a new type of energy harvester for converting multi-axial and low-frequency motion from humans the environment into electrical domain. An innovative array electrostatic transducer cells is used to convert mechanical captured by freely rolling spherical magnetic proof mass. The magnet never comes in contact with but rather transfers via coupling. inertial mass attracts fluid/ferrofluid causes it actuate variable-gap capacitor. A micromachined prototype fabricated demonstrate that repeatable capacitance changes are possible velocities range 2-18 mm/s. cubic NdFeB grade N42 5 mm edge length can generate 16 pF transitions at distance 0.5 surface array. density 9 mJ/mm be expected 100 V pre-bias.

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