Capacitively coupled radiofrequency plasma source
作者： Raymond S. Robinson , Harold R. Kaufman
DOI:
关键词: Plasma 、 Ion 、 Capacitively coupled plasma 、 Radiofrequency plasma 、 Analytical chemistry 、 Electron 、 Magnetic field 、 Chemistry 、 Electrode 、 Atomic physics 、 Field strength
摘要: A pair of dissimilarly-sized electrodes are driven by a radiofrequency source to create plasma. magnetic field is oriented be parallel surface area on the smaller electrode. The strength increases either side that As shown, ions electrostatically accelerated out plasma, but they instead may magnetically, electrons in alternative extracted or there no accelerating mechanism.
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