Membrane for a capacitive vacuum measuring cell
作者： Per Björkman
DOI:
关键词: Corrosion 、 Membrane 、 Green body 、 Materials science 、 Flattening 、 Composite material 、 Capacitive sensing 、 Ceramic membrane 、 Sintering
摘要: The invention relates to a ceramic membrane for capacitive vacuum measuring cell which is very resistant corrosion. In order be able measure low pressures with high precision, the made of thin foil-shaped green body having thickness 250νm, especially 120νm, planeness by flattening after sintering process.
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