Dual MEMS Resonator Structure for Temperature Sensor Applications
作者： Humberto Campanella , Margarita Narducci , Srinivas Merugu , Navab Singh
关键词: Order of magnitude 、 Resonator 、 Optoelectronics 、 Sensitivity (electronics) 、 Microelectromechanical systems 、 Electronic engineering 、 Nitride 、 Electrode 、 Materials science 、 Temperature coefficient 、 Frequency separation
摘要: This paper reports an acoustic microelectromechanical system (MEMS) resonator structure that features dual-resonant response at 180 and 500 MHz. The MEMS uses aluminum nitride as layer electrodes with dual design provide dual-resonance behavior. Each resonant mode operates the first symmetrical Lamb-wave (S0). Due to large frequency separation between modes, device exhibits differentiated temperature coefficient of frequency) for each mode, which makes this suitable thermometric beat sensing. Reported devices are thus capable multiply 20-ppm/°C thermal sensitivity individual sensors by one order magnitude, up −334 ppm/°C sensor.
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