Lorentz force microelectromechanical system (MEMS) and a method for operating such a MEMS

摘要: A microelectromechanical system (MEMS), formed on a substrate, comprises utilization device having first state and second state, Lorentz force actuator an element coupled to the device. The is displaceable by alter of from thereof. An electrostatic device, electrically chargeable electrostatically hold in thereof with minimal electrical power consumption. may be any kind including electrical, fluidic, optical or mechanical. For example, comprise switch, which case open switch closed switch. bidirectionality facilitates opening MEMS whose contacts are stuck makes possible design switches double-throw configurations. Also disclosed method for operating conductive movable between position position. steps passing current through predetermined direction presence intercepting magnetic field move toward response action force, holding position, terminating element.