Assessment of optical coherence tomography for metrology applications in high-scattering ceramic materials
作者： Rong Su
DOI:
关键词: Materials science 、 Micro devices 、 Optical coherence tomography 、 Optoelectronics 、 Scattering 、 Mechanical engineering 、 Metrology 、 Stacking 、 Ceramic
摘要: Large-scale and cost-effective manufacturing of ceramic micro devices based on tape stacking requires the development inspection systems to perform high-resolution in-process quality control ...
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