Femtosecond laser processing of ceria-based micro actuators

摘要: Abstract In this paper we present a novel femtosecond laser micro-processing of gadolinium doped cerium oxide (CGO) taking advantage the unique properties ultra-short pulse. The process can be extended to other materials which are incompatible with conventional deposition/patterning/etching processes. For example, CGO electrostrictive ceramics is lead-free and non-toxic, compatible Si-microfabrication exhibits large electrostriction effect at low frequencies. These qualities make into promising electroactive material for MEMS applications. However, lithography suffers from yield due metal shorts damage during etch clean Wet patterning very difficult often results in enhanced leakage or between electrodes. compatibility issues avoided by using patterning. As proof concept, precise electro-active ceramic Ce0.95Gd0.05O1.975 (CGO5) thin films (1.7 μm-thick) demonstrated. was used fabricate double-clamped beam actuators made CGO5 sandwiched two contacts. new studied preliminary guide lines presented. design rules established; margin top contact edges layer defined prior ablation prevent short-circuiting bottom contacts ablation. Electro-mechanical testing resulting devices demonstrates long-term mechanical electrical endurance 1.2 mm long beams. Using excitation (voltage amplitude 10 V carrier frequency 10 MHz modulated 10 Hz), actuation 10 Hz induced an in-plane strain 7×10−6 without any observable degradation >800 k cycles. processes presented work, therefore, provide technological framework integration MEMS-devices.