作者: Kyounei Yasuda
DOI:
关键词: Electronic engineering 、 Fabrication 、 Contact resistance 、 Thin-film transistor 、 Layer (electronics) 、 Interconnection 、 Undercut 、 Materials science 、 Line (electrical engineering) 、 Optoelectronics 、 Electrical conductor
摘要: A LCD device prevents corrosion of the transparent conductive layers and contact resistance increase without arising step coverage degradation due to thickness interconnection layer, formation undercut portions, productivity reduction fabrication cost increase. first line comprising a patterned Al or alloy layer is disposed on over an insulating plate. formed cover have hole exposing part line. material made plated metal in with exposed hole. material. The electrically connected by way