Parametric Studies of Thin Film Nickel Catalyst for the Growth of Carbon Nanotubes
作者： M. A. R. Saidin , M. Aziz , A. F. Ismail , Mohamad Rusop , Tetsuo Soga
DOI: 10.1063/1.3160134
关键词: Chemical vapor deposition 、 Nanotechnology 、 Carbon nanotube supported catalyst 、 Materials science 、 Chemical engineering 、 Catalysis 、 Thin film 、 Sputtering 、 Particle size 、 Carbon nanotube 、 Nickel
摘要: The thickness and morphology of the catalyst film significantly affect properties carbon nanotubes (CNTs). size shape are key factors for controlling CNT diameter. Therefore, objectives this study to develop a thin CNTs growth application by varying time deposition investigate effect radio frequency (rf) plasma power. was developed using physical sputtering method with an rf power between 20 100 watt at nickel as catalyst. Ni/Cr in fabricated on corning glass substrates. obtained 12 nm surface profiler characterized field emission scanning electron microscopy (FESEM) atomic force (AFM) determine morphologies particle It observed that structural Ni is influenced time.
harvard.edu
scitation.org
researchgate.net 
sci-hub.se 参考文章(7)
Tetsuo Shimizu, Hiroshi Tokumoto, Seiji Akita, Yoshikazu Nakayama, Stable atomic imaging of Si(1 1 1)-7×7 surface by scanning tunneling microscope with carbon nanotube tip Surface Science. ,vol. 486, ,(2001) , 10.1016/S0039-6028(01)01119-0
H. Wang, J. Lin, C.H.A. Huan, P. Dong, J. He, S.H. Tang, W.K. Eng, T.L.J. Thong, Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition Applied Surface Science. ,vol. 181, pp. 248- 254 ,(2001) , 10.1016/S0169-4332(01)00391-9
N.I. Sinitsyn, Yu.V. Gulyaev, G.V. Torgashov, L.A. Chernozatonskii, Z.Ya. Kosakovskaya, Yu.F. Zakharchenko, N.A. Kiselev, A.L. Musatov, A.I. Zhbanov, Sh.T. Mevlyut, O.E. Glukhova, Thin films consisting of carbon nanotubes as a new material for emission electronics international vacuum electron sources conference. ,vol. 111, pp. 145- 150 ,(1997) , 10.1016/S0169-4332(96)00695-2
A.C. Dillon, K.M. Jones, T.A. Bekkedahl, C.H. Kiang, D.S. Bethune, Heben, M.J, Storage of hydrogen in single-walled carbon nanotubes Nature. ,vol. 386, pp. 377- 379 ,(1997) , 10.1038/386377A0
Sumio Iijima, Helical microtubules of graphitic carbon Nature. ,vol. 354, pp. 56- 58 ,(1991) , 10.1038/354056A0
Hongjie Dai, Carbon nanotubes: opportunities and challenges Surface Science. ,vol. 500, pp. 218- 241 ,(2002) , 10.1016/S0039-6028(01)01558-8
Hongjie Dai, Carbon Nanotubes: Synthesis, Integration, and Properties Accounts of Chemical Research. ,vol. 35, pp. 1035- 1044 ,(2002) , 10.1021/AR0101640