Microcantilevers for biological and chemical assays and methods of making and using thereof

作者: Mo Yang , Cengiz Ozkan , Abdul-Rahim A. Khaled , Robert C. Haddon , Kambiz Vafai

DOI:

关键词: Structural shapesBiochipNanotechnologyAnalytePiezoresistive effectMaterials science

摘要: Disclosed herein are microcantilevers having structural shapes that less sensitive to turbulence and drift effects yet provide greater deflections due analyte concentration. The include a C-shaped microcantilever, an E-shaped L-shaped double slit tapered triangular microcantilever. may be piezoresistive microcantilevers. Also disclosed microsensors, microfludic devices, biochips comprise the as well methods of using detect analytes in fluid sample.

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