Water protective surface layer on fluorozirconate glass produced by low‐energy oxygen ion implantation
作者： Yisheng Dai , Toshiyasu Kawaguchi , Koichi Suzuki , Susumu Suzuki , Kiyoshi Yamamoto
DOI: 10.1063/1.104656
关键词: X-ray photoelectron spectroscopy 、 Oxygen ions 、 Inorganic chemistry 、 Layer (electronics) 、 Ion implantation 、 Fluorine 、 Corrosion 、 Surface layer 、 Nuclear chemistry 、 Materials science 、 Zirconium
摘要: Fluorozirconate glass with the composition of 53ZrF4‐20BaF2‐4LaF3‐3AlF3‐20NaF was implanted 15 keV oxygen ions to dose 2×1017ions/cm2. The surface layer modified by implantation exhibited excellent chemical durability against aqueous corrosion although it showed little influence on visible and infrared transmission glass. X‐ray photoelectron spectroscopy measurement indicated that zirconium oxidized fluorine incorporated in an oxyfluoride structure. This chemically stable prevented from being corroded water.
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