Method and system for in situ formation of gas-phase compounds

作者: Jereld Lee Winkler , Eric Hill , John Tolle

DOI:

关键词: Analytical chemistryIn situChemistryPressure controlReaction chamberGas phase

摘要: A system and method for providing intermediate reactive species to a reaction chamber are disclosed. The includes an formation fluidly coupled the provide chamber. pressure control device can be used operating of chamber, heater heat desired temperature.

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