Ion source for elemental analysis
作者： Klaus Wetzig , Detlef Schiel , Guenther Pietzsch , Klaus Moehler , Volker Hoffmann
DOI:
关键词: Plasma 、 Mass spectrometry 、 Ion source 、 Ion 、 Cathode 、 Anode 、 Electric discharge in gases 、 Analytical chemistry 、 Elemental analysis 、 Materials science
摘要: An ion source for elemental analysis in respect of solid material samples by means the plasma a low-pressure gas discharge comprises chamber having an inlet channel (8) and suction-extraction (9) working gas. The has cathode (2) cylindrical hollow anode (1) with which (10) is generated over sample (5). exhibits aperture (4) emission into mass spectrometer ions to be analysed. also additional (11) extraction suction leads side This allows increase output even though pressure lowered. In modification (fig 3) window radiation from used optical spectroscopy.
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