Compact atomic force microscope

作者: Dror Sarid , John A. Gurley , Virgil B. Elings

DOI:

关键词: Magnetic force microscopeAtomic force microscopySample (graphics)Scanning Hall probe microscopeScannerChemistryOpticsMeasure (physics)MicroscopeMagnetic field

摘要: This is an atomic force microscope in which the sensor can be built as a very small integrated structure. The utilizes optical interference and operated either contact mode for high resolution or non-contact to measure electric magnetic fields. One configuration of this stand-alone placed on suspended above large samples scanning local areas thereof. into scanner so that scanned over stationary sample.

参考文章(7)
Minoru Numoto, Tsutomu Kanzaki, Surface texture measuring instrument ,(1987)
Robert E. Hetrick, Resonant vibrating structure with electrically driven wire coil and vibration sensor Journal of the Acoustical Society of America. ,vol. 88, pp. 2048- 2048 ,(1988) , 10.1121/1.400159
Lloyd C. Bobb, Optical fiber interferometer ,(1987)