Near infrared optical properties of laser ablated VO2 thin films by ellipsometry
作者： M. Nagashima , H. Wada
DOI: 10.1016/S0040-6090(97)00360-X
关键词: Laser 、 Spectrophotometry 、 Refractive index 、 Laser ablation 、 Chemistry 、 Extinction (optical mineralogy) 、 Ellipsometry 、 Thin film 、 Deposition (phase transition) 、 Analytical chemistry
摘要: Abstract Optical properties of vanadium dioxide (VO 2 ) thin films, prepared under various deposition conditions by laser ablation, were investigated at 1.3 μm wavelength. constants, n and k , measured ellipsometry. Not only the extinction coefficients, but also refractive indices, remarkably changed through phase transition. The reflectances, r transmittance, calculated from these their transition profiles in temperature almost coincided with those directly obtained spectrophotometry. analysis magnitude reflectance revealed clear relation between values conditions: ambient oxygen pressure substrate temperature.
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