Tunable resonant cavity enhanced detectors using vertically actuated MEMS mirrors
作者： Niels Quack , Stefan Blunier , Jurg Dual , Martin Arnold , Ferdinand Felder
DOI: 10.1088/1464-4258/10/4/044015
关键词: Particle detector 、 Photodiode 、 Optoelectronics 、 Nanophotonics 、 Molecular beam epitaxy 、 Microelectromechanical systems 、 Photodetector 、 Fabrication 、 Optics 、 Infrared detector 、 Physics
摘要: … and fabrication of a MEMS mirror is discussed in detail and its integration with the counter mirror and the … Results obtained with external mirrors moved by piezoactuation as well as first …
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