Preparation of carbon fibers/carbon/alumina tubular composite membranes and their applications in treating Cu-CMP wastewater by a novel electrochemical process: Part 2

作者: Gordon C.C. Yang , Chi-Ming Tsai

DOI: 10.1016/J.MEMSCI.2009.01.021

关键词: ElectrofiltrationChemical engineeringCoatingMembranePolyvinylidene chlorideFiltrationAnalytical chemistryMaterials scienceTaguchi methodsEnvironmental scanning electron microscopeCarbonization

摘要: Abstract This work (designated Part 2 of this study) aims to further discuss the present authors’ research findings relevant that reported earlier 1 study). In Parts and study, carbon fibers/carbon/alumina tubular composite membranes (CCA-TCMs) were first prepared through substrate formation, polyvinylidene chloride (PVDC) film wrapping, PVDC carbonization, catalyst precursor coating, chemical vapor deposition (CVD) process. The finished CCA-TCMs, with a pore size distribution ranging from 20 nm nominal ca. 3.5 nm, characterized by environmental scanning electron microscopy (ESEM), high-resolution transmission (HR-TEM), permporometry. so CCA-TCMs incorporated into crossflow simultaneous electrocoagulation (EC/EF) treatment module evaluate their capabilities in treating Cu-CMP (chemical mechanical polishing copper layer) wastewater obtained wafer fab. Crossflow EC/EF performance tests carried out based on Taguchi experimental design using electric field strength, velocity, transmembrane pressure, filtration area as factors. Under optimal operating conditions, coupled are capable yield permeate turbidity below 0.3 NTU. meantime, removal efficiencies 82 91% for total solids (TS), organic (TOC), Cu, Si could be obtained. By comparing results conditions determined designs fractional factorial method yielded similar good qualities permeate. A evaluation technical significance study shows promising fundamental practical results.

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