Method for producing thin layers and corresponding layer

作者: Christopher Dölle , Matthias Ott , Klaus-Dieter Vissing

DOI:

关键词: Liquid layerWavelengthCoatingAnalytical chemistryThin layersMaterials scienceLayer (electronics)

摘要: The invention relates to a coating method comprising the following steps: a) mixture or pure substance consisting of inactive liquid precursors is provided, b) layer applied surface be coated, c) are cross-linked by means radiation having wavelength ≤ 250 nm, such that solid created from mixture, said ≥ 10 atomic % C, in relation quantity atoms contained layer, without H and F, maximum 50 C part methoxy group. also layers produced producible method, uses thereof, corresponding coated objects thereof.

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