Substrate structure and assembly method for reduced spatial light modulator size
作者： James Lawrence Sanford , Kei-Hsiung Yang , Chandrasekhar Narayan , Evan George Colgan , Robert Lee Melcher
DOI:
关键词: Silicon 、 Optoelectronics 、 Cover glass 、 Materials science 、 Seal (mechanical) 、 Si substrate 、 Liquid crystal 、 Spatial light modulator 、 Substrate (electronics) 、 Glass cover 、 Engineering drawing
摘要: A spatial light modulator designed to use a minimum area on the surface of silicon substrate. This invention comprises substrate back plate with glass cover that is used seal liquid crystal between and Most importantly, glue formed contain material Si only one side remaining three sides. structure allows smaller semiconductor be used.
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