The measurement of surface texture and topography by differential light scattering
作者： E.L. Church
DOI: 10.1016/0043-1648(79)90143-1
关键词: Intensity (heat transfer) 、 Characterization (materials science) 、 Materials science 、 Scattering theory 、 Light scattering 、 Surface (mathematics) 、 Optics 、 Surface finish 、 Scattering 、 Differential (mathematics)
摘要: Abstract The use of light scattering as a tool for the measurement two-dimensional surface topography is discussed. Various versions theory are used to explore relation between angular distribution scattered intensity and features, inversely express various deterministic statistical finish parameters in terms measurements. Particular attention paid characterization diamond-turned surfaces because rich variety features they exhibit their increasing technological importance.
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