Handling apparatus for transferring carriers and a method of transferring carriers
作者： Teruo Asakawa , Tetsu Ohsawa
DOI:
关键词: Mechanism (engineering) 、 Transport engineering 、 Mechanical engineering 、 Loader 、 Engineering
摘要: A handling apparatus, used for a carrier of semiconductor wafers, comprises first mechanism transferring between loader/unloader table and storage compartment, second mechanism, moving the in both vertical horizontal directions. The includes an arm, loading portion carrier, arm-rocking mechanism. moves to table, picks up then where arm is rocked, so as discharge object from portion.
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