Steady-State Model of an Argon–Helium High-Pressure Radio Frequency Dielectric Barrier Discharge

作者: Daniel J. Emmons , David E. Weeks

DOI: 10.1109/TPS.2020.3009493

关键词: Electric fieldMaterials scienceDielectric barrier dischargeHeliumAtomic physicsElectronMetastabilityReaction rateArgonIonization

摘要: A steady-state kinetic model of argon–helium high-pressure radio frequency dielectric barrier discharge is developed using a simplified reaction rate package appropriate for pressures ranging from 200 to 500 torr. Electron production and loss rates are analyzed as function pressure Ar–He mixture, highlighting the importance Ar2* dimer higher Ar rich mixtures. As increases, primary ionization mechanism shifts between ground state ionization, which affects reduced electric field due electron energy required two dominant mechanisms. The resulting profile controls metastable Ar(1s5) production, which, combined with rates, reveals density Ar-fraction. This 0-D shows close agreement previous time-dependent simulations robust package.

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