Introduction and Literature Review
作者： Hoang-Phuong Phan
DOI: 10.1007/978-3-319-55544-7_1
关键词: Piezoelectricity 、 Electrical resistance and conductance 、 Piezoresistive effect 、 Gauge factor 、 Microelectromechanical systems 、 Power consumption 、 Semiconductor 、 Materials science 、 Engineering physics 、 Miniaturization
摘要: The piezoresistance is defined as the change in electrical resistance of a material under external mechanical strain or stress, which was discovered by Smith 1954 (Barlian et al., Proc IEEE, 97(3):513–552, 2009, [1]). Since then, great number research works have been relentlessly carried out to elucidate phenomenon numerous materials. Besides fundamental investigation, applications piezoresistive effect semiconductors can be found Micro Electro Mechanical Systems (MEMS) sensors, thanks its superior properties, including device miniaturization, simple readout circuit, and low power consumption (Eaton Smith, Smart Mater Struct, 6:530–539, 1997, [2]; Kumar Pant, Microsyst Technol, 20(7):1213–1247, 2014, [3]), compared other sensing technologies (e.g. electrostatic, piezoelectric optical).
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