System tools applied to micro-cantilever based devices

作者: A. Sebastian , S. Salapaka , M. V. Salapaka

DOI: 10.1007/3-540-36589-3_7

关键词: BroadbandPower (physics)Robust controlCantileverControl engineeringSystem identificationSample (statistics)EngineeringAtomic force microscopyIdentification (information)

摘要: Micro-cantilever based devices can be used to investigate and manipulate matter at atomic scales. Taking the case study of force microscope (AFM) we demonstrate power system tools in analysis micro-cantilever devices. They capture important characteristics predict inherent limitations operation these Such a systems approach is shown complement physical studies performed on Tractable models are developed for AFM operating tapping-mode. For interrogation samples, it also imperative that sample positioning should done with high precision speeds. This broadband nanopositioning problem fit into modern robust control framework. illustrated by design, identification such device.

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