Nonlinear Plasmonics: Four-photon Near-field Photolithography using Optical Antennas

作者: Hao Jiang , Reuven Gordon

DOI: 10.1007/S11468-013-9584-0

关键词: OptoelectronicsPlasmonPhotoresistPhotolithographyNonlinear opticsOrder of magnitudeAbsorption (electromagnetic radiation)Nonlinear systemNear and far fieldOpticsMaterials science

摘要: Recent experiments on four-photon nonlinear exposure of photoresist near nanoplasmonic structures raise a question: What processes are responsible for the observed profile? Here, we study poly(methyl methacrylate) (PMMA) in near-field gold nanoantennas. We consider six possible and them terms developed volumes profiles photoresist. find that direct fourth harmonic generation (4HG) is dominant process. The volume from 4HG both match closely with experiments. next strongest process absorption (4PA) PMMA. strength 4PA about one order magnitude weaker than 4HG. predicted clearly deviate

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