Monolithic Silicon Photonic Crystal Fiber Tip Sensors

摘要: Photonic Crystals (PC) enable sensitive and robust sensors for a large number of measurands, including temperature, refractive index, displacement, pressure, acceleration, rotation. The small volumes two-dimensional PC also make them ideal integration onto the facet optical fibers. In this chapter, we describe operation, design, fabrication Si index process technology used to integrate facets standard single-mode fibers (SMFs). are fabricated on wafers, using single photolithography mask combination isotropic anisotropic etching. Once sensor is completed, miniaturized (50 μm × 50 0.5 μm) assembled SMF facets. results highly-sensitive, with submicron sensing layers that well suited deployment in harsh environments, temperatures up 700 °C.