Gallium-doped zinc oxide targets fabricated by sintering: Impact of target quality on sputtered thin film properties
作者： Jia Liu , Weijia Zhang , Dengyuan Song , Qiang Ma , Lei Zhang
DOI: 10.1016/J.MSSP.2014.06.005
关键词: Sintering 、 Materials science 、 Doping 、 Thin film 、 Ceramic 、 Sputter deposition 、 Composite material 、 Sputtering 、 Metallurgy 、 Powder metallurgy 、 Gallium
摘要: Abstract This research reports the sintering mechanism of Ga doped ZnO (GZO) ceramic targets. The GZO powders with different doping concentrations were synthesized by chemical co-precipitation method and compacted to form green compacts. compacts underwent a normal process under temperatures. Then series targets sintered at 1300 °C used for depositing thin films DC magnetron sputtering method. influences temperature concentration on densification, structural electrical properties investigated. Results showed that effectively promoted qualities When surpassed 1300 °C, relative densities all higher than 97%. lowest resistivity 2.25×10−3 Ω cm was attained 0.5 at% 1300 °C. In addition, performances greatly influenced their
sci-hub.se 参考文章(34)
Sanghun Lee, Dongkeun Cheon, Won-Jeong Kim, Moon-Ho Ham, Woong Lee, Ga-doped ZnO films deposited with varying sputtering powers and substrate temperatures by pulsed DC magnetron sputtering and their property improvement potentials Applied Surface Science. ,vol. 258, pp. 6537- 6544 ,(2012) , 10.1016/J.APSUSC.2012.03.073
VJ Norman, The diffusion of aluminium and gallium in zinc oxide Australian Journal of Chemistry. ,vol. 22, pp. 325- 329 ,(1969) , 10.1071/CH9690325
Deok Kyu Kim, Hong Bae Kim, Room temperature deposition of Al-doped ZnO thin films on glass by RF magnetron sputtering under different Ar gas pressure Journal of Alloys and Compounds. ,vol. 509, pp. 421- 425 ,(2011) , 10.1016/J.JALLCOM.2010.09.047
Tadatsugu Minami, Jun-ichi Oda, Jun-ichi Nomoto, Toshihiro Miyata, Effect of target properties on transparent conducting impurity-doped ZnO thin films deposited by DC magnetron sputtering Thin Solid Films. ,vol. 519, pp. 385- 390 ,(2010) , 10.1016/J.TSF.2010.08.007
F. Wu, L. Fang, Y.J. Pan, K. Zhou, Q.L. Huang, C.Y. Kong, Effect of substrate temperature on the structural, electrical and optical properties of ZnO:Ga thin films prepared by RF magnetron sputtering Physica E-low-dimensional Systems & Nanostructures. ,vol. 43, pp. 228- 234 ,(2010) , 10.1016/J.PHYSE.2010.07.007
Ming-Wei Wu, Day-Shan Liu, Yu-Hsiang Su, The densification, microstructure, and electrical properties of aluminum-doped zinc oxide sputtering target for transparent conductive oxide film Journal of the European Ceramic Society. ,vol. 32, pp. 3265- 3275 ,(2012) , 10.1016/J.JEURCERAMSOC.2012.04.030
Richard W. Siegel, Synthesis and properties of nanophase materials Materials Science and Engineering A-structural Materials Properties Microstructure and Processing. ,vol. 168, pp. 189- 197 ,(1993) , 10.1016/0921-5093(93)90726-U
E Fortunato, L Raniero, L Silva, A Goncalves, A Pimentel, P Barquinha, H Aguas, L Pereira, G Goncalves, I Ferreira, E Elangovan, R Martins, Highly stable transparent and conducting gallium-doped zinc oxide thin films for photovoltaic applications Solar Energy Materials and Solar Cells. ,vol. 92, pp. 1605- 1610 ,(2008) , 10.1016/J.SOLMAT.2008.07.009
Nuno Neves, Raquel Barros, Elsa Antunes, João Calado, Elvira Fortunato, Rodrigo Martins, Isabel Ferreira, None, Aluminum doped zinc oxide sputtering targets obtained from nanostructured powders: Processing and application Journal of the European Ceramic Society. ,vol. 32, pp. 4381- 4391 ,(2012) , 10.1016/J.JEURCERAMSOC.2012.08.007
Chung Ping Liu, Gwo Rou Jeng, Properties of aluminum doped zinc oxide materials and sputtering thin films Journal of Alloys and Compounds. ,vol. 468, pp. 343- 349 ,(2009) , 10.1016/J.JALLCOM.2008.01.053