Preparation and tribological properties of DLC/Ti film by pulsed laser arc deposition ∗
作者： Zhang Zhen-Yu , Lu Xin-Chun , Luo Jian-Bin , Shao Tian-Min , Qing Tao
DOI: 10.1088/1009-1963/15/11/039
关键词: Materials science 、 Auger electron spectroscopy 、 Composite material 、 Raman spectroscopy 、 Diamond-like carbon 、 Carbon 、 Nanoindenter 、 Deposition (law) 、 Tribology 、 Ellipsometry
摘要: This paper reports that DLC (diamond like carbon)/Ti and films were prepared by using pulsed laser arc deposition. R-ray diffraction, Auger electron spectroscopy, Raman atomic force microscopy, nanoindenter, spectroscopic ellipsometer, surface profiler micro-tribometer employed to study the structure tribological properties of DLC/Ti films. The results show film, with I(D)/I(G) 0.28 corresponding 76% sp3 content calculated uniform chemical composition along depth direction, 98 at% carbon, hardness 8.2 GPa Young's modulus 110.5 GPa, compressive stress 6.579 thickness 46 nm, coefficient friction 0.08, critical load 95mN, exhibits excellent mechanical properties.
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