Transfer chamber for flat display device manufacturing apparatus
作者： Gwang Ho Hur , Jun Young Choi , Cheol Won Lee , Sang Baek Lee
DOI:
关键词:
摘要: The present invention relates to a transfer chamber for flat display device manufacturing apparatus, and more particularly, having combination of functions load-lock chambers, in which robot is provided aside from center the chamber, buffer be driven without interference robot, aligner adjust position substrate mounted on buffer. In order achieve aforementioned objects, there wherein chamber. addition, drive sealing member seal hole formed at predetermined portion an adjusting where are provided.
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