Film bulk acoustic resonator and film bulk acoustic resonator circuit

摘要: In a film bulk acoustic resonator, multi-layered member is placed on substrate. The has: common electrode; piezoelectric layer formed the first electrode which layer, and used for resonator; second surrounds edge of with forming gap therebetween, spurious suppressing element; wiring through an electric power supplied to electrode. includes ferroelectric film, polarization state corresponding resonator different from element.