System and method for manufacturing photovoltaic structures with a metal seed layer
作者： Wei Wang
DOI:
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摘要: One embodiment of the present invention can provide a system for fabrication photovoltaic structure. The include physical vapor deposition tool configured to sequentially deposit transparent conductive oxide layer and metallic on an emitter formed in first surface Si substrate, without requiring substrate be removed from after depositing layer. further electroplating plate grid thermal annealing anneal
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