Introduction to Semiconductor Manufacturing Technology

摘要: IC chip manufacturing processes, such as photolithography, etch, CVD, PVD, CMP, ion implantation, RTP, inspection, and metrology, are complex methods that draw upon many disciplines. Introduction to Semiconductor Manufacturing Technologies, Second Edition thoroughly describes the complicated processes with minimal mathematics, chemistry, physics; it covers advanced concepts while keeping contents accessible readers without degrees. Designed a textbook for college students, this book provides realistic picture of semiconductor industry an in-depth discussion fabrication technology. The text focuses on current technologies, but older technologies discussed historical context.