An all electronic, fully microfabricated micro gas chromatograph
作者： Y. Qin , Y.B. Gianchandani
DOI: 10.1109/TRANSDUCERS.2015.7181001
关键词:
摘要: This paper reports a full micro gas chromatograph (µGC) in which all the components are electronic. All components, including Knudsen pump, preconcentrator, separation columns, and capacitive detectors, form complete µGC system that has no moving parts, uses room air as carrier gas, can be fabricated by common low-cost process. The preliminary experimentally demonstrated sampling, separation, detection of 12 chemicals with 1– 10 ppm concentrations. calculated limit is expected to reach low 20 ppb.
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