High-performance enhancement-mode AlGaN/GaN HEMTs using fluoride-based plasma treatment
作者： Yong Cai , Yugang Zhou , K.J. Chen , K.M. Lau
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摘要: … electronegativity of the fluorine ions, the incorporated F ions can provide im… can be converted to E-mode HEMT. In our letter, the CF plasma treatment can result in a threshold voltage …
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