Diffractive photo masks and methods of using and fabricating the same
作者： Guy Matthew Burrow , Thomas K. Gaylord
DOI:
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摘要: An exemplary embodiment of the present invention provides a diffractive photo-mask comprising body element, plurality interference/image-forming hologram gratings, and zero-order beam blocking element. The gratings can be located on or in are configured to diffract light produce one more functional elements surrounded by high-spatial-frequency periodic optical-intensity distribution at substrate plane when is incident upon photo-mask. element block diffracted beams
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