Micromechanical angular accelerometer with auxiliary linear accelerometer

摘要: A micromechanical accelerometer comprises a mass of monocrystalline silicon in which substantially symmetrical plate attached to frame by flexible linkages is produced selective etching. The has plurality apertures patterned and etched therethrough speed further etching freeing the linkages, suspending them above void beneath. capable limited motion about an axis created linkages. An comprised symmetrical, linkage supported configuration implemented as angular paired with auxiliary linear accelerometer, used compensate for sensitivity sensor, achieve instrument that insensitive acceleration responds acceleration.