Compact rram device and methods of making same
作者： Eng Huat Toh , Shyue Seng Tan , Elgin Quek
DOI:
关键词:
摘要: Disclosed herein is a compact RRAM (Resistance Random Access Memory) device structure and various methods of making such an device. In one example, disclosed includes gate electrode, conductive sidewall spacer at least variable resistance material layer positioned between the electrode spacer.
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