Piezoelectric ultrasonic transducer and process

摘要: A piezoelectric micromechanical ultrasonic transducer (PMUT) includes a multilayer stack disposed on substrate. The may include an anchor structure over the substrate, layer structure, and mechanical proximate to stack. be cavity. seal cavity and, together with stack, is supported by forms membrane cavity, being configured undergo one or both of flexural motion vibration when PMUT receives transmits signals.