作者: Teruaki Motooka , Tsuyoshi Uda
DOI: 10.1016/B978-0-323-29965-7.00008-7
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摘要: This chapter describes the multiscale modeling methods. Multiscale consists of calculation material properties on one level using information or models from different levels. It throws some light macroscopic and microscopic equations. Macroscopic equations are better to analyze characteristics MEMS device this provides details this. In order theoretically obtain I–V characteristic, it is necessary solve appropriate in both scales. The popular methods for solving PDEs like finite-difference method finite element explained extent. also includes first principles electronic-structure calculations Si-based NEMS.