Ultraviolet light imprinted sol-gel silica glass low-loss waveguides for use at 1.55 um

摘要: The fabrication and characterization of UV-light-imprinted solgel silica glass waveguides on silicon substrates are described. Waveguide parameters evaluated. Appropriate combinations UV light exposure time, sol-gel film thickness, postbake time produce suitable for use at a 1.55-?m wavelength. Propagation losses in these less than 0.3 dB/cm.