Micromachined silicon microvalve
作者： T. Ohnstein , T. Fukiura , J. Ridley , U. Bonne
DOI: 10.1109/MEMSYS.1990.110256
关键词:
摘要: The fabrication and experimental results of an electrostatically actuated silicon microvalve which modulates a gas flow are presented. converts electric signal to pneumatic for pressure or gas-flow control. Application areas the include control industrial, commercial, medical applications. is integrally fabricated on single wafer using surface bulk micromachining. operates against pressures up 114 mmHg flows 150 sccm with 30 volt hold back 760 mmHg. valve may be operated in DC pulse width-modulated voltage modes. >
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