Method and system for detecting an arc condition
作者： Stefan Jan Juergen Zschiegner , Benjamin N. Eldridge
DOI:
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摘要: A method and apparatus for detecting an arc condition in a semiconductor test system is disclosed. While probes are being moved into or out of contact with wafer, the voltage level power supplied to selected ones monitored. If exceeds that could cause between wafer while moved, indication generated has been detected.
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