Plasma deposited microporous analyte detection layer
作者： Neal A. Rakow , Dora M. Paolucci , Moses M. David , John E. Trend
DOI:
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摘要: Plasma deposited microporous analyte detection layers, method of forming and sensors including the same are disclosed. An sensor includes a substrate amorphous random covalent network layer. The layer silicon, carbon, hydrogen oxygen with mean pore size in range from 0.5 to 10 nanometers an optical thickness 0.2 2 micrometers.
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