Contact-free thickness measuring method and device

摘要: A method and device for the contact-free measurement of thickness a workpiece having first second surfaces which are opposite plane-parallel to each other characterized by providing single laser beam, deflecting splitting deflected beam into two sub-beams directed sides reference plane, reflecting at least portion towards plane so that is moved on one from an initial position in surface reflects along given path sensing associated with portions sub-beams. By calculating angle movement based lapse time move causing detection reflected distance point can be determined. If substantially parallel determined utilizing plane. tilted about axis may points determine thickness. all axes relative distances workpiece.