A new parameter extraction technique for small-signal equivalent circuit of polysilicon emitter bipolar transistors

作者: Seonghearn Lee , B.R. Ryum , Sang Won Kang

DOI: 10.1109/16.277373

关键词:

摘要: We propose a new parameter extraction method for advanced polysilicon emitter bipolar transistors. This is based on the predetermination of equivalent circuit parameters using analytical expressions de-embedded Z-parameters these devices. These values are used as initial process optimization. The entire device circuit, containing RF probe pad and interconnection extracted by test structures, optimized to fit measured S-parameters eliminating de-embedding errors due imperfection structures. determined this shows excellent agreement with from 0.1 26.5 GHz. >

参考文章(13)
Ian E. Getreu, Modeling the bipolar transistor Elsevier Scientific Pub. Co.. ,(1978)
A. Fraser, R. Gleason, E.W. Strid, GHz on-silicon-wafer probing calibration methods Proceedings of the 1988 Bipolar Circuits and Technology Meeting,. pp. 154- 157 ,(1988) , 10.1109/BIPOL.1988.51067
M.C.A.M. Koolen, J.A.M. Geelen, M.P.J.G. Versleijen, An improved de-embedding technique for on-wafer high-frequency characterization bipolar circuits and technology meeting. pp. 188- 191 ,(1991) , 10.1109/BIPOL.1991.160985
T. Sakai, S. Konaka, Y. Kobayashi, M. Suzuki, Y. Kawai, Gigabit logic bipolar technology: advanced super self-aligned process technology Electronics Letters. ,vol. 19, pp. 283- 284 ,(1983) , 10.1049/EL:19830198
A. Neugroschel, Measurement of the low-current base and emitter resistances of bipolar transistors IEEE Transactions on Electron Devices. ,vol. 34, pp. 817- 822 ,(1987) , 10.1109/T-ED.1987.23001
T.H. Ning, D.D. Tang, Method for determining the emitter and base series resistances of bipolar transistors IEEE Transactions on Electron Devices. ,vol. 31, pp. 409- 412 ,(1984) , 10.1109/T-ED.1984.21541
S. Lee, A. Gopinath, New circuit model for RF probe pads and interconnections for the extraction of HBT equivalent circuits IEEE Electron Device Letters. ,vol. 12, pp. 521- 523 ,(1991) , 10.1109/55.119176
H. Cho, D.E. Burk, A three-step method for the de-embedding of high-frequency S-parameter measurements IEEE Transactions on Electron Devices. ,vol. 38, pp. 1371- 1375 ,(1991) , 10.1109/16.81628
W.M.C. Sansen, R.G. Meyer, Characterization and measurement of the base and emitter resistances of bipolar transistors IEEE Journal of Solid-state Circuits. ,vol. 7, pp. 492- 498 ,(1972) , 10.1109/JSSC.1972.1050324
A.P. Laser, D.L. Pulfrey, Reconciliation of methods for estimating f/sub max/ for microwave heterojunction transistors IEEE Transactions on Electron Devices. ,vol. 38, pp. 1685- 1692 ,(1991) , 10.1109/16.119002