Superplastic backward microextrusion of microparts for micro-electro-mechanical systems

作者: Yasunori Saotome , Hiroyuki Iwazaki

DOI: 10.1016/S0924-0136(01)00957-8

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摘要: Abstract This study seeks to establish microforming technologies for micro-electro-mechanical systems (MEMS) parts such as microgears below 50 μm in module. For this purpose, it is important develop new methods fabricate microdies and select suitable materials microforming. Photochemically machinable glass has been used by photolithography anisotropic etching techniques. Al–78Zn superplastic material LaAlNi amorphous alloy have employed microextrusion. These the great advantage of deformation under very low stresses comparison with conventional plastic deformation. Furthermore, exhibit good microformability. A backward extrusion machine developed study. Specimens were placed a container extruded piezoelectric actuator vacuum or an argon gas atmosphere. Microextrusion succeeded forming microgear shafts. The gear alloy, module 20 μm diameter pitch circle 200 μm.

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